CT 350

Technology

• -Fast and accurate magnetic linear motors
• -Measurement speed 4kHz
• -350 mm travel in x- and y-direction, lateral resolution 0.05 µm, optional motorized z-axis
• -Optimized for multi sensor systems (e.g. Chromatic Confocal, IR, White Light Inteferemetry, CFM, ETC)
• -Keep full 300mm coverage for all attached sensors
• -3 Linear Motors (2 x X-Axis , 1 x Y-Axis)
• -SEMI S2/S8 Certification
• -On-axis camera or high resolution off-axis camera
• -Can be combined with any loader/unloader that supports SMEMA and SECS/GEM
• -Sophisticated analysis and automation software

Chromatic Confocal Line Sensor 

-High Speed Confocal Line Sensor

-384,000 data points / sec.

-768,000 data points / sec. Optional

-192 spots per line

-Z-resolution down to 20 nm

-High numeric aperture models

-Maintenance free

-Interlaced scanning (variable lateral resolution)