Non-contact profilometer with a 315 x 315 XY scanning area
The CT 300 is a non-contact profilometer with a 315 mm x-, y-motion system. It can handle up 12” wafers or other large substrates and parts. It is ideal for measuring flatness with sub-micron accuracy over the complete 315 mm travel. Using a chromatic white light sensor and a data collection rate of up to 4 kHz the inspection time is minimized. The sensors are available with a resolution down to 3 nm and a measurement range up to 25 mm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measureing wafer thickness.